JPS638128Y2 - - Google Patents
Info
- Publication number
- JPS638128Y2 JPS638128Y2 JP4034381U JP4034381U JPS638128Y2 JP S638128 Y2 JPS638128 Y2 JP S638128Y2 JP 4034381 U JP4034381 U JP 4034381U JP 4034381 U JP4034381 U JP 4034381U JP S638128 Y2 JPS638128 Y2 JP S638128Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- reaction tube
- cooling
- heat
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010791 quenching Methods 0.000 description 4
- 230000000171 quenching effect Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4034381U JPS638128Y2 (en]) | 1981-03-24 | 1981-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4034381U JPS638128Y2 (en]) | 1981-03-24 | 1981-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57153995U JPS57153995U (en]) | 1982-09-27 |
| JPS638128Y2 true JPS638128Y2 (en]) | 1988-03-10 |
Family
ID=29837457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4034381U Expired JPS638128Y2 (en]) | 1981-03-24 | 1981-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS638128Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0691031B2 (ja) * | 1986-11-25 | 1994-11-14 | 九州日本電気株式会社 | 拡散炉装置 |
| JPH06103671B2 (ja) * | 1987-02-14 | 1994-12-14 | 大日本スクリ−ン製造株式会社 | 基板の熱処理装置 |
-
1981
- 1981-03-24 JP JP4034381U patent/JPS638128Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57153995U (en]) | 1982-09-27 |
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